环境与气象仪器

洁净室仪器

HVAC及工业仪表

GF100系列EtherCAT质量流量计
型号 GF100 / GF101 / GF120 / GF120XSL / GF120XSD / GF121 / GF125 / GF126,加强了拥有EtherCAT?的速度

特点

  • 每年<满量程的±0.15%的长期零点稳定性
  • 响应稳定时间: 300毫秒 – <1秒
  • 流量可达到300 slpm
  • 全金属密封的流体通路:可选5μ 或 10μ inch Ra的表面粗糙度
  • 抗腐蚀的哈氏合金升温传感器在温度升高时改善了测量的重复性
  • MultiFloTM 气体和量程的可编程性—一台表,几千种气体和量程的组合,无需把MFC从管路上拆除,也不会影响精度
  • 方便的用户显示和独立的诊断/服务端口可帮助仪表安装,监测和故障排查
  • GF120 安全传输系统(SDS?)是布鲁克斯的低压降质量流量控制计,用于离子注入和刻蚀工艺的负压安全传输系统的气体传输
型号 GF100 GF101 GF120 GF120XSD GF120XSD GF121 GF125 GF126
区别 High Purity High Purity

萨索洛v切沃 www.burwiu.com.cn High Flow Rate

Ultra-High Purity

Ultra-Fast Response Time

SDS Gas Delivery SDS Gas Delivery Ultra-High Purity

High Flow Rate

Ultra-High Purity

Ultra-Fast Response

Pressure Transient Insensitivity

High Flow Rate
流量范围-满量程容量 3 sccm – 55 slm 55 slm – 300 slm 3 sccm – 55 slm 4 – 25 sccm >25 sccm?– 1 slm 55 slm – 300 slm 3 sccm – 55 slm 55 slm – 300 slm
表面抛光 10μ inch Ra 10μ inch Ra 5μ inch Ra 5μ inch Ra 5μ inch Ra 5μ inch Ra 5μ inch Ra 5μ inch Ra
精度 ±1% S.P. > 20-100%

±0.20% F.S. 2-20%

±1% S.P. > 35-100%

±0.35% F.S. 2-35%

±1% S.P. > 20-100%

±0.20% F.S. 2-20%

±1% S.P. > 35-100%

±0.35% F.S. 2-35%

±1% S.P. > 35-100%

±0.35% F.S. 2-35%

±1% S.P. > 35-100%

±0.35% F.S. 2-35%

±1% S.P. > 20-100%

±0.20% F.S. 2-20%

±1% S.P. > 35-100%

±0.35% F.S. 2-35%

重复性 < ±0.15% S.P. < ±0.15% S.P. < ±0.15% S.P. < ±0.15% S.P. < ±0.15% S.P. < ±0.15% S.P. < ±0.15% S.P. < ±0.15% S.P.
响应时间-常闭 Normally Closed

<1 sec

Normally Closed

<1 sec

Normally Closed

700 ms

Normally Closed

<3 sec

Normally Closed

<3 sec

Normally Closed

<1 sec

Normally Closed

300ms – <700ms

Normally Closed

<1 sec

响应时间-???/td> Normally Open

<1.5 sec

Normally Open

Normally Open

<1.5 sec

Normally Open

Normally Open

Normally Open

Normally Open

<1.5 sec

Normally Open

多气体多量程 MultiFlo™ Standard MultiFlo™ Standard MultiFlo™ Standard MultiFlo™ Standard MultiFlo™ Standard MultiFlo™ Standard
瞬时压力波动不敏感 ±5% S.P. up to 5 psi/sec upstream press. spike Ability to measure inlet pressure
诊断能力 Status Lights & Alarms Status Lights & Alarms Status Lights & Alarms Status Lights & Alarms Status Lights & Alarms Status Lights & Alarms Status Lights & Alarms Status Lights & Alarms
数字通讯 EtherCAT EtherCAT EtherCAT EtherCAT EtherCAT EtherCAT EtherCAT EtherCAT

友情链接: 意大利德尔特(Deltaohm)   萨索洛v切沃   美国ONSET公司HOBO记录仪|气象站

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