环境与气象仪器

洁净室仪器

HVAC及工业仪表

GF100 系列金属密封热质量流量计
型号 GF100 / GF101 / GF120 / GF120XSL / GF120XSL / GF121高纯度流路。GF100 系列金属密封质量流量控制器和仪表性能:快速响应和可重现的高纯度/超高纯度过程气体输送。专为半导体、MOCVD 等其他气体流量控制应用设计,GF100 系列可确保测量结果可重现并且长时间使用后性能依然高度稳定。一台采用标准 MultiFlo™ 技术的 MFC 即可满足数千种气体类型和各种量程组合的需求,无需从气路上拆除 MFC 并且不影响精度。结果:提高工艺灵活性和效率辅以业内高纯度的过程气体,有助于提高产率和生产效率。
型号 GF100 GF101 GF120 GF120XSL GF120XSL GF121
区别 High Purity High Purity

萨索洛v切沃 www.burwiu.com.cn High Flow Rate

Ultra-High Purity

Ultra-Fast Response Time

SDS Gas Delivery SDS Gas Delivery Ultra-High Purity

High Flow Rate

流量范围-满量程容量 3 sccm – 55 slm 55 slm – 300 slm 3 sccm – 55 slm >25 sccm?– 1 slm 4 – 25 sccm 55 slm – 300 slm
表面抛光 10μ inch Ra 10μ inch Ra 4μ inch Ra 4μ inch Ra 4μ inch Ra 4μ inch Ra
精度 ±1% S.P. > 35-100%

±0.35% F.S. 2-35%

±1% S.P. > 35-100%

±0.35% F.S. 2-35%

±1% S.P. > 35-100%

±0.35% F.S. 2-35%

±1% S.P. > 35-100%

±0.35% F.S. 2-35%

±1% S.P. > 35-100%

±0.35% F.S. 2-35%

±1% S.P. > 35-100%

±0.35% F.S. 2-35%

重复性 < ±0.15% S.P. < ±0.15% S.P. < ±0.15% S.P. < ±0.15% S.P. < ±0.15% S.P. < ±0.15% S.P.
响应时间-常闭 Normally Closed

<1 sec

Normally Closed

<1 sec

Normally Closed

700 ms

Normally Closed

<3 sec

Normally Closed

<3 sec

Normally Closed

<1 sec

响应时间-???/td> Normally Open

<1.5 sec

Normally Open

Normally Open

<1.5 sec

Normally Open

Normally Open

Normally Open

多气体多量程 MultiFlo™ Standard MultiFlo™ Standard MultiFlo™ Standard MultiFlo™ Standard
瞬时压力波动不敏感
诊断能力 Status Lights: MFC Health & Network Status

Alarms: Control Valve Output & Network Interruption

Status Lights: MFC Health &?Network Status

Alarms: Control Valve Output &?Network Interruption

Status Lights: MFC Health &?Network Status

Alarms: Control Valve Output &?Network Interruption

Status Lights: MFC Health &?Network Status

Alarms: Control Valve Output &?Network Interruption

Status Lights: MFC Health &?Network Status

Alarms: Control Valve Output &?Network Interruption

Status Lights: MFC Health &?Network Status

Alarms: Control Valve Output &?Network Interruption

模拟通讯 0-5 Vdc 0-5 Vdc 0-5 Vdc 0-5 Vdc 0-5 Vdc 0-5 Vdc
数字通讯 RS485?L Protocol

DeviceNet™

RS485?L Protocol

DeviceNet™

RS485?L Protocol

DeviceNet™

RS485?L Protocol

DeviceNet™

RS485?L Protocol

DeviceNet™

RS485?L Protocol

DeviceNet™

友情链接: 意大利德尔特(Deltaohm)   萨索洛v切沃   美国ONSET公司HOBO记录仪|气象站

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